ISSN:
0032-3888
Schlagwort(e):
Chemistry
;
Chemical Engineering
Quelle:
Wiley InterScience Backfile Collection 1832-2000
Thema:
Chemie und Pharmazie
,
Maschinenbau
,
Physik
Notizen:
This paper presents the preliminary results of efforts to improve dry processed electron beam resist materials using plasma polymerization coating technology. Three approaches investigated were chemical susceptibility modification, the use of multilayer resist structures, and the effect of grafting reactions.
Zusätzliches Material:
7 Ill.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1002/pen.760231813
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