ISSN:
0032-3888
Keywords:
Chemistry
;
Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
This paper presents the preliminary results of efforts to improve dry processed electron beam resist materials using plasma polymerization coating technology. Three approaches investigated were chemical susceptibility modification, the use of multilayer resist structures, and the effect of grafting reactions.
Additional Material:
7 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pen.760231813
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