ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
An accurate algorithm is described for the computation of the theoretical values of the linear four-point probe thickness correction factors for point injection of current and insulating and conducting substrates. Three expressions are presented for the insulating substrate case that yield maximum fractional errors of 0.03%, 10−6, and 10−16, respectively. Additional expressions are presented for the case of a film on a conducting substrate and a critical comparison of the two cases is made. The theoretical basis of the algorithms, a Euler–Maclaurin expansion, is described. © 2001 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1394186
