Publication Date:
2014-12-19
Description:
Publication date: March 2015 Source: Ultramicroscopy, Volume 150 Author(s): Robert Estivill , Adeline Grenier , Sébastien Duguay , François Vurpillot , Tanguy Terlier , Jean-Paul Barnes , Jean-Michel Hartmann , Didier Blavette The quantification of carbon and germanium in a Si/SiGeC multilayer structure using atom probe tomography has been investigated as a function of analysis conditions. The best conditions for quantitative results are obtained using an intermediate electric field and laser power. Carbon evaporation shows strong spatial and temporal correlation. By using multi-ion event analysis, an evaporation mechanism is put forward to explain the modification of mass spectra as a function of electric field and laser power.
Print ISSN:
0304-3991
Topics:
Electrical Engineering, Measurement and Control Technology
,
Natural Sciences in General
,
Physics
