Publication Date:
2014-12-13
Description:
Publication date: March 2015 Source: Vacuum, Volume 113 Author(s): S. Alsheikh Salo , S. Haddad The electron swarm parameters of Ar/He mixtures in a low pressure 13.56 MHz hollow cathode discharge in remote plasma are analyzed utilizing Boltzmann equation method. These parameters are important to understand the mechanism of plasma dynamics and could not be measured directly. In this work, we calculate the electron energy distribution functions (EEDF), compare them with experimental results, and determine the mobility, the drift velocity, the average electron energy and the diffusion coefficients in pure argon and in Ar/He mixtures.
Print ISSN:
0042-207X
Electronic ISSN:
1879-2715
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
