In:
Chinese Optics Letters, Shanghai Institute of Optics and Fine Mechanics, Vol. 11, No. S1 ( 2013), p. S10502-
Materialart:
Online-Ressource
ISSN:
1671-7694
Originaltitel:
Black Silicon nanostructures on silicon thin films prepared by reactive ion etching
DOI:
10.3788/COL/2013/11/S1
DOI:
10.3788/col201311.s10502
Sprache:
Englisch
,
Chinesisch
Verlag:
Shanghai Institute of Optics and Fine Mechanics
Publikationsdatum:
2013
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