In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 52, No. 4S ( 2013-04-01), p. 04CF11-
Abstract:
High-performance aluminum-doped zinc oxide thin-film transistors (AZO TFTs) have been successfully fabricated on glass substrates. By controlling the oxygen flow ratio (OFR) during the deposition of an AZO active layer, we have demonstrated that the incorporation of oxygen in the deposition atmosphere plays an important role in improving the electronic performance of TFTs. For gate voltage V G = -2 to 5 V, the TFTs with an AZO active layer sputter deposited in an atmosphere of Ar and O 2 mixture at room temperature (RT) as the channel layer exhibit much better properties than TFTs whose AZO layer was deposited in pure Ar atmosphere, such as a high saturation mobility (µ sat ) of 113 cm 2 V -1 s -1 , a positive threshold voltage V th of 1.5 V, an improved steep subthreshold swing from 400 to 125 mV/decade, a decreased off-state current ( I off ) from 10 -8 to 5×10 -13 A, an increased on/off ratio from 10 5 to 10 9 , and a higher transmittance of 82.5%.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.7567/JJAP.52.04CF11
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2013
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
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