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  • 1990-1994  (6)
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  • 1
    Electronic Resource
    Electronic Resource
    A high-current microwave ion source for ion implantation : Proceeding of the fourth International Conference on ion sources (1992)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 63 (1992), S. 2562-2564 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A new 2.45 GHz microwave ion source has been developed for high-current ion implantation. The source uses permanent magnets to generate the ECR magnetic field. This leads to a much simpler and more compact design than typical solenoidal field microwave sources. The strong magnetic field and high-microwave power density are used to achieve a 11B+ ion fraction of up to 30% in extracted boron beams. Previous work on microwave ion sources for ion implantation has ordinarily not dealt with performance or lifetime issues for boron operation, which are critical in evaluating the overall utility of an implanter ion source. This is due to the generally poor performance of microwave sources with boron, as well as the limited source lifetime. Details of the performance and lifetime characteristics of this source with BF3 are presented in this paper.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1142889
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    Paper (German National Licenses)
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  • 2
    Electronic Resource
    Electronic Resource
    Characterization of a Bernas ion source for multiply charged ion implantation : Proceedings of the 5th international conference on ion sources (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 1307-1309 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Due to concerns about energy purity and reduced beam current, the use of multiply charged ions to achieve higher effective ion energies with a fixed acceleration potential has not been common for implantation users in the semiconductor industry. Energy purity is compromised primarily by charge exchange in the implanter beamline, caused by neutral gas originating from the ion source extraction aperture. Beam current has been an issue, since traditional implanter ion sources, such as the Freeman source, produce very limited currents of multiply charged species. At low beam currents, the implanter is not economical to use, hence the lack of commercial use of multiply charged ion implantation. Ion sources that address these issues must also meet requirements for adequate source lifetime, simplicity of operation (for computer control) and maintenance, and low cost of ownership. This paper details beam energy purity and usable beam currents for a new medium current Bernas ion source as compared to a standard Freeman ion source. The results show significant performance improvements, while also increasing the ion source lifetime.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1144988
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    Paper (German National Licenses)
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  • 3
    Electronic Resource
    Electronic Resource
    Electron-suppression experiments in a small multicusp H− source (1990)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 61 (1990), S. 1110-1116 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Several techniques for suppressing the electrons before they form part of the extracted beam have been studied in a small multicusp H− source. It is found that some schemes reduce both the electron and the H− output currents. Other approaches, such as the installation of a collar at the extraction aperture, the addition of xenon or cesium to the hydrogen discharge, or the reduction of the source plasma potential, not only can reduce the electron current substantially, but bring about an enhancement in the extracted H− current.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1141432
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    Paper (German National Licenses)
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  • 4
    Electronic Resource
    Electronic Resource
    Production of atomic nitrogen ion beams (1990)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 61 (1990), S. 315-317 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A small multicusp ion source has been used to generate beams of nitrogen ions. To achieve a high percentage of N+ ions, the source was equipped with a magnetic filter and operated with a high N2 gas density. A nearly pure atomic nitrogen ion (N+) beam (98.5% N+, 1.5% N2+), suitable for implantation purposes, was produced. The operating characteristics of this source, including species mix, are presented.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1141280
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    Paper (German National Licenses)
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  • 5
    Electronic Resource
    Electronic Resource
    Analysis of the ion beam obtained from a small multicusp ion source : International conference on ion sources (1990)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 61 (1990), S. 327-329 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: The small multicusp ion source developed at Lawrence Berkeley Laboratory (LBL) has been equipped with a low voltage ratio, single aperture extraction system. The influence of the potential of the plasma electrode and of a dipole filter field on the beam emittance are measured. A simple method to reduce hash is suggested. The aim of these investigations is to produce nitrogen ion beams with a high atomic ion fraction and a low emittance as required for a RFQ-accelerator, which will be built for ion implantation.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1141284
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    Paper (German National Licenses)
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  • 6
    Electronic Resource
    Electronic Resource
    Corticosteroid by aerosol in septic pigs — effects on pulmonary function and oxygen transport (1993)
    Springer
    Intensive care medicine 19 (1993), S. 155-160 
    Details
    ISSN: 1432-1238
    Keywords: Sepsis ; Staph. aureus ; ARDS ; Corticosteroid ; Aerosol
    Source: Springer Online Journal Archives 1860-2000
    Topics: Medicine
    Notes: Abstract Objective To assess effects of nebulized corticosteroid on lung function in sepsis. Design Randomized, placebo-controlled, blinded study in septic pigs. Setting A trauma research laboratory Materials 16 juvenile pigs, one excluded due to pulmonary hypertension at baseline. Interventions Mechanical ventilation and continuous light anesthesia. Brief infusion of liveStaph. aureus (4×1010cfu) followed by nebulization of beclomethasone sone dipropionate (BDP) 50μg/kg (n=8) or placebo (n=7) 30 and 360 min after start of septic challenge. Measurements and results Vascular pressures, cardiac output, lung mechanics, gas exchange and oxygen transport variables were measured at regular intervals. An identical transient rise in mean pulmonary artery pressure was seen in both groups (mean±SD: 48±4 mmHg), followed by a gradual increase in pulmonary vascular resistance, reaching maximum at 4h but significantly reduced by BDP compared to placebo (p〈0.01, ANOVA). Mean systemic arterial pressure, arterial oxygen tension and lung compliance did not change significantly in the BDP group, but they all declined in the placebo-group (p〈0.01 compared to baseline,p〈0.05–0.01 between the groups). Oxygen delivery decreased significantly in the placebo group at 12h (p〈0.05). Oxygen extraction increased in both groups (p〈0.01 compared to baseline), being significantly higher in the placebo group at 12h (p〈0.05). Conclusion Nebulized corticosteroid protects pulmonary function in sepsis, indicating a therapeutic role in the treatment of septic ARDS.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1007/BF01720531
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    Paper (German National Licenses)
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