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  • 1
    Electronic Resource
    Electronic Resource
    A high-current microwave ion source for ion implantation : Proceeding of the fourth International Conference on ion sources (1992)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 63 (1992), S. 2562-2564 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A new 2.45 GHz microwave ion source has been developed for high-current ion implantation. The source uses permanent magnets to generate the ECR magnetic field. This leads to a much simpler and more compact design than typical solenoidal field microwave sources. The strong magnetic field and high-microwave power density are used to achieve a 11B+ ion fraction of up to 30% in extracted boron beams. Previous work on microwave ion sources for ion implantation has ordinarily not dealt with performance or lifetime issues for boron operation, which are critical in evaluating the overall utility of an implanter ion source. This is due to the generally poor performance of microwave sources with boron, as well as the limited source lifetime. Details of the performance and lifetime characteristics of this source with BF3 are presented in this paper.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1142889
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  • 2
    Electronic Resource
    Electronic Resource
    Electron-suppression experiments in a small multicusp H− source (1990)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 61 (1990), S. 1110-1116 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Several techniques for suppressing the electrons before they form part of the extracted beam have been studied in a small multicusp H− source. It is found that some schemes reduce both the electron and the H− output currents. Other approaches, such as the installation of a collar at the extraction aperture, the addition of xenon or cesium to the hydrogen discharge, or the reduction of the source plasma potential, not only can reduce the electron current substantially, but bring about an enhancement in the extracted H− current.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1141432
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  • 3
    Electronic Resource
    Electronic Resource
    Characterization of a Bernas ion source for multiply charged ion implantation : Proceedings of the 5th international conference on ion sources (1994)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 65 (1994), S. 1307-1309 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: Due to concerns about energy purity and reduced beam current, the use of multiply charged ions to achieve higher effective ion energies with a fixed acceleration potential has not been common for implantation users in the semiconductor industry. Energy purity is compromised primarily by charge exchange in the implanter beamline, caused by neutral gas originating from the ion source extraction aperture. Beam current has been an issue, since traditional implanter ion sources, such as the Freeman source, produce very limited currents of multiply charged species. At low beam currents, the implanter is not economical to use, hence the lack of commercial use of multiply charged ion implantation. Ion sources that address these issues must also meet requirements for adequate source lifetime, simplicity of operation (for computer control) and maintenance, and low cost of ownership. This paper details beam energy purity and usable beam currents for a new medium current Bernas ion source as compared to a standard Freeman ion source. The results show significant performance improvements, while also increasing the ion source lifetime.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1144988
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  • 4
    Electronic Resource
    Electronic Resource
    H− production in a small multicusp ion source with addition of barium (1989)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 54 (1989), S. 210-212 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The effect on H− production by adding barium to a hydrogen discharge, in a small magnetically filtered multicusp ion source, has been investigated. It is found that the addition of barium can increase the H− output by a factor of 30. A strong dependence of H− output on the temperature of the ion source wall has also been observed.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.101011
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  • 5
    Electronic Resource
    Electronic Resource
    Volume production of Li− in a small multicusp ion source (1987)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 51 (1987), S. 566-568 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Negative lithium ions, generated by volume processes, have been extracted from a small magnetically filtered multicusp ion source. Current densities of 1.9 mA/cm2 have been obtained with a discharge voltage of 40 V and a discharge current of 4 A.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.98349
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  • 6
    Electronic Resource
    Electronic Resource
    Production of H− ions with addition of cesium or xenon to a hydrogen discharge in a small multicusp ion source (1988)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 64 (1988), S. 3424-3428 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The effect on H− ion production by adding cesium or xenon to a hydrogen discharge, in a small magnetically filtered multicusp ion source, has been investigated. Addition of cesium vapor to the hydrogen discharge resulted in a factor of 16 increase in H− output relative to the uncesiated discharge for the same operating parameters. Likewise, the addition of xenon gas to a hydrogen discharge resulted in a factor of 2.7 increase in H− output over pure hydrogen operation at optimum H2 source pressure, while maintaining the same arc parameters. Operation of the source with the plasma electrode at optimum bias voltage was essential to obtain this result.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.341498
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  • 7
    Electronic Resource
    Electronic Resource
    Development of low-energy oxygen ion beams for surface studies (1986)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 60 (1986), S. 3015-3017 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A small microwave ion source has been constructed to generate low-energy (5–10 eV) oxygen beams. The source is fabricated from a quartz tube and is enclosed by a microwave cavity. The source is operated without an external extraction voltage. Positive ions effuse from the source with energies equal to the plasma potential. The source has been operated in a cw mode producing an atomic oxygen ion fluence 〉1×1014 cm−2 s−1 with energies as low as 5.5 eV. The "self-extracted'' ion beam can be used to simulate the oxygen environment encountered in low earth orbits.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.337755
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  • 8
    Electronic Resource
    Electronic Resource
    Production of atomic or molecular nitrogen ion beams using a multicusp and a microwave ion source (1988)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 63 (1988), S. 5678-5682 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Two small ion sources have been used to generate positive nitrogen ion beams. One is a multicusp ion source, the other is a compact microwave ion source which needs no magnetic field for operation. Both sources are operated with and without a magnetic filter to control the energetic electron population near the extraction region. Results for both ion sources, including current densities and ionic species mix are presented. The multicusp ion source can produce beams of nitrogen ions with greater than 90% of the ion species either N+ or N+2 with current densities of ∼8 and 2.5 mA/cm2, respectively. The microwave ion source can generate nitrogen ion beams composed of more than 85% N+2 with current densities of ∼30 mA/cm2.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.340302
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  • 9
    Electronic Resource
    Electronic Resource
    Characteristics of a compact microwave ion source (1986)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 57 (1986), S. 1531-1535 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A small microwave ion source has been fabricated from a quartz tube with one end enclosed by a two-grid accelerator. The source is also enclosed by a cavity operated at a frequency of 2.45 GHz. Microwave power as high as 500 W can be coupled to the source plasma. The source has been operated with different geometries and for various gases in a cw mode. For hydrogen, ion current density of 200 mA/cm2 with atomic species concentration as high as 80% has been extracted from the source. It has been demonstrated that low-energy oxygen ion beams can also be extracted from the source. Beam-energy spread has been measured to be less than 1 eV.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1139197
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  • 10
    Electronic Resource
    Electronic Resource
    Optimization of H− production from a small multicusp ion source (1989)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 60 (1989), S. 531-538 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: A small multicusp source has been developed to generate volume-produced H− ion beams in pulsed operation. To obtain high H− current densities (J−〉250 mA/cm2), this source requires relatively high gas pressure and high discharge power. Experiments have been conducted to improve the arc and gas efficiencies, the beam pulse shape, and the H− to electron ratio in the extracted beam by optimizing the filter magnetic field, the thickness and axial position of the extraction aperture in the plasma electrode, and by mixing xenon or other elements with hydrogen in the discharge. The biggest improvement is achieved by adding cesium to the source, resulting in a fivefold increase in the extractable H− current and a substantial drop in the e/H− ratio. In order to improve the lifetime of the cathode, both filament and coaxial type LaB6 cathodes have been developed and have been operated successfully in this H− source.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1140359
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