In:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena, American Vacuum Society, Vol. 29, No. 1 ( 2011-01-01)
Kurzfassung:
Epitaxial Dy2O3 thin films are grown on SrTiO3(001) substrates by molecular beam epitaxy. Structural, morphological, and interfacial properties of the Dy2O3 film are investigated by in situ reflection high-energy electron diffraction (RHEED), ex situ x-ray diffraction (XRD), atomic force microscopy, and cross-sectional transmission electron microscopy (TEM). RHEED patterns and XRD spectra show that the Dy2O3 film is grown epitaxially in a cubic phase with a (001) orientation. The surface of the film is smooth with a rms roughness of 4 Å. The TEM image shows that the Dy2O3 film is crystalline with an abrupt interface between the film and substrate without any indication of a chemical reaction or interdiffusion occurring at the interface.
Materialart:
Online-Ressource
ISSN:
2166-2746
,
2166-2754
Sprache:
Englisch
Verlag:
American Vacuum Society
Publikationsdatum:
2011
ZDB Id:
3117331-7
ZDB Id:
1475429-0
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