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Development of low-energy oxygen ion beams for surface studies (1986)

Walther, S. R. ; Leung, K. N. ; Kunkel, W. B.

[S.l.] : American Institute of Physics (AIP)

Journal of Applied Physics 60 (1986), S. 3015-3017

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ISSN: 1089-7550

Source: AIP Digital Archive

Topics: Physics

Notes: A small microwave ion source has been constructed to generate low-energy (5–10 eV) oxygen beams. The source is fabricated from a quartz tube and is enclosed by a microwave cavity. The source is operated without an external extraction voltage. Positive ions effuse from the source with energies equal to the plasma potential. The source has been operated in a cw mode producing an atomic oxygen ion fluence 〉1×1014 cm−2 s−1 with energies as low as 5.5 eV. The "self-extracted'' ion beam can be used to simulate the oxygen environment encountered in low earth orbits.

Type of Medium: Electronic Resource

URL: http://dx.doi.org/10.1063/1.337755

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