Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
63 (1988), S. 198-206
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
The laser-assisted chemical vapor deposition of metals is modeled. The case of pyrolytic deposition induced by a continuous laser source is considered. The heat transfer in the solid substrate is considered to be transient, while the gas-phase heat and mass transfer are assumed to be in the quasi-steady state. The model accommodates the use of temperature-dependent physical properties and the occurrence of irregularly shaped deposits. The modeling equations are solved by a finite element approach which is briefly described. Volcanolike deposits are predicted under certain conditions of gas pressure and laser intensity. Model predictions show that depletion effects and adsorption-desorption phenomena are major factors in influencing the occurrence of volcanolike deposits.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.340490
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