Keywords:
Electron-molecule collisions.
;
Electronic books.
Type of Medium:
Online Resource
Pages:
1 online resource (790 pages)
Edition:
1st ed.
ISBN:
9781441989710
Series Statement:
Physics of Atoms and Molecules Series
URL:
https://ebookcentral.proquest.com/lib/geomar/detail.action?docID=3075141
DDC:
539.7/57
Language:
English
Note:
Fundamental Electron Interactions with Plasma Processing Gases -- Copyright -- Contents -- Preface -- Acknowledgments -- Chapter 1 FUNDAMENTAL ELECTRON-MOLECULE INTERACTIONS AND THEIR TECHNOLOGICAL SIGNIFICANCE -- Chapter 2 ELECTRON-MOLECULE INTERACTIONS IN THE GAS PHASE: CROSS SECTIONS AND COEFFICIENTS -- Chapter 3 SYNTHESIS AND ASSESSMENT OF ELECTRON COLLISION DATA -- Chapter 4 ELECTRON INTERACTIONS WITH CF4, C2F6, AND C3F8 -- Chapter 5 ELECTRON INTERACTIONS WITH CHF3, CF3I, AND c-C4F8 -- Chapter 6 ELECTRON INTERACTIONS WITH Cl2, CCl2F2, BCl3, AND SF6 -- Index -- About the Authors.
