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A model for quantification of GDOES depth profiles (2014)

Elsevier

In: Vacuum

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Publikationsdatum: 2014-12-13

Beschreibung: Publication date: March 2015 Source: Vacuum, Volume 113 Author(s): Y. Liu , W.H. Yu , J.Y. Wang The MRI (Mixing-Roughness-Information depth) model and the CRAS (Crater-Simulation) model are combined for the quantification of GDOES (glow discharge optical emission spectroscopy) depth profile by taking into account the effects of crater, roughness and preferential sputtering in depth profiling. This combined model is successfully applied for the quantification of the measured GDOES depth profiles of N in a nitride coating and of Ni in a Ni-coated copper substrate.

Print ISSN: 0042-207X

Digitale ISSN: 1879-2715

Thema: Maschinenbau , Physik

Publiziert von Elsevier

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