In:
Journal of the Korean Vacuum Society, The Korean Vacuum Society, Vol. 20, No. 2 ( 2011-03-30), p. 86-92
Type of Medium:
Online Resource
ISSN:
1225-8822
Uniform Title:
화학기상증착 진공공정의 실시간 진단연구
DOI:
10.5757/JKVS.2011.20.2.086
Language:
English
Publisher:
The Korean Vacuum Society
Publication Date:
2011