In:
Journal of the Surface Finishing Society of Japan, The Surface Finishing Society of Japan, Vol. 43, No. 12 ( 1992), p. 1223-1229
Type of Medium:
Online Resource
ISSN:
0915-1869
,
1884-3409
Uniform Title:
IBED法によるc‐BN膜形成におけるArイオンボンバードメントの効果
Language:
Japanese
Publisher:
The Surface Finishing Society of Japan
Publication Date:
1992
detail.hit.zdb_id:
2218957-9
detail.hit.zdb_id:
1338869-1