In:
Materials Science Forum, Trans Tech Publications, Ltd., Vol. 663-665 ( 2010-11), p. 546-550
Abstract:
Li and Al codoped ZnO (LAZO) thin films have been prepared by sol-gel method. The electrical and structural properties of the LAZO films have been investigated. X-ray diffraction (XRD) results showed that the prepared LAZO films had a polycrystalline hexagonal wurtzite structure. X-ray photoelectron spectrometer (XPS) measurements indicated that our sol-gel prepared films were of high purity and codoped with Li and Al evidenced by peaks centered at 74.1 and 55.6 eV. The resulting LAZO films were p-type, and had a low resistivity in the range of 10-3~100 Ωcm, and high carrier concentration in the range of 1014~1018 cm-3.
Type of Medium:
Online Resource
ISSN:
1662-9752
DOI:
10.4028/www.scientific.net/MSF.663-665
DOI:
10.4028/www.scientific.net/MSF.663-665.546
Language:
Unknown
Publisher:
Trans Tech Publications, Ltd.
Publication Date:
2010
detail.hit.zdb_id:
2047372-2