In:
Infrared and Laser Engineering, Shanghai Institute of Optics and Fine Mechanics, Vol. 51, No. 7 ( 2022), p. 20220050-
Type of Medium:
Online Resource
ISSN:
1007-2276
Uniform Title:
Calibration method of the phase-shifting error for the topography measurement utilizing white light interferometric microscopy
DOI:
10.3788/IRLA/2022/51/7
DOI:
10.3788/IRLA20220050
Language:
English
,
Chinese
Publisher:
Shanghai Institute of Optics and Fine Mechanics
Publication Date:
2022