In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 61, No. SA ( 2022-01-01), p. SA1008-
Abstract:
We formed FePt magnetic nanodots (NDs) by exposing an ultrathin bilayer metal stack on ∼3.0 nm SiO 2 /Si(100) substrates to a remote H 2 plasma (H 2 -RP) and studied the effect of external heating during the exposure to H 2 -RP on the formation and magnetic properties of NDs. The ultrathin bilayer with a uniform surface coverage drastically changed to NDs with an areal density as high as ∼3.5 × 10 11 cm −2 by exposing to H 2 -RP with external heating. We also found that NDs formed by the exposure to H 2 -RP at 400 °C exhibited a perpendicular anisotropy with a perpendicular coercivity of ∼1.5 kOe, reflecting the magneto-crystalline anisotropy of (001)-oriented L1 0 phase FePt.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.35848/1347-4065/ac2036
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2022
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7