In:
Sensors, MDPI AG, Vol. 20, No. 1 ( 2019-12-23), p. 106-
Abstract:
In this work, a high sensitivity micro-thermal conductivity detector (μTCD) with four thermal conductivity cells was proposed. Compared with conventional TCD sensors, the thermal conductivity cell in this work was designed as a streamlined structure; the thermistors were supported by a strong cantilever beam and suspended in the center of the thermal conductivity cell, which was able to greatly reduce the dead volume of the thermal conductivity cell and the heat loss of the substrate, improving the detection sensitivity. The experimental results demonstrated that the μTCD shows good stability and high sensitivity, which could rapidly detect light gases with a detection limit of 10 ppm and a quantitative repeatability of less than 1.1%.
Type of Medium:
Online Resource
ISSN:
1424-8220
Language:
English
Publisher:
MDPI AG
Publication Date:
2019
detail.hit.zdb_id:
2052857-7