In:
Science and Technology Development Journal, Viet Nam National University Ho Chi Minh City, Vol. 12, No. 12 ( 2009-06-28), p. 59-64
Abstract:
The Ti-doped Zno films were deposited onto glass substrates from ceramic targets ZnO with various Ti concentrations using a DC magnetron sputtering. The experimental results show that all thin films are transparent and conductive oxide films, with the appropriate Ti concentration (⁓1.5% Ti), the conductance of films can be improved. Optical characteristics of thin films was determined by UV-V is spectroscopy. The thickness of thin films was measured by Stylus method. The electrical resistivity was measured by four-point probe, and the roughness of films was determined by AFM.
Type of Medium:
Online Resource
ISSN:
1859-0128
DOI:
10.32508/stdj.v12i12.2320
Language:
Unknown
Publisher:
Viet Nam National University Ho Chi Minh City
Publication Date:
2009