In:
MRS Proceedings, Springer Science and Business Media LLC, Vol. 324 ( 1993)
Abstract:
In this paper the application of microscope-spectrophotometry to the nondestructive characterization of a variety of multi-layer GaAs/A1GaAs structures, is described. Spectral reflectance results are used to indirectly determine variations in aluminium content, and the interdependency of aluminium content with layer thicknesses. The penetration depth of light from the visible spectrum is assessed from the correlation between spectral reflectance measurements and fitted optical models. Finally, a series of single quantum wells are investigated, and it is concluded that a significant improvement in the characterization of these materials will be achieved with an extension of the spectral measurement range into the ultra violet.
Type of Medium:
Online Resource
ISSN:
0272-9172
,
1946-4274
DOI:
10.1557/PROC-324-111
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
1993
