In:
Journal of Materials Research, Springer Science and Business Media LLC, Vol. 17, No. 7 ( 2002-07), p. 1735-1742
Abstract:
The effects of IrO 2 /Pt layered hybrid bottom and/or top electrode structures on the leakage current density versus voltage ( J–V ), polarization versus voltage ( P–V ), ferroelectric imprint, and fatigue properties of chemical-solution-derived Pb(Zr x Ti 1− x )O 3 (PZT, Zr/Ti = 35/65) thin films were investigated. The best P–V and J–V performances were obtained from a capacitor with nonhybrid electrodes (Pt/PZT/Pt capacitor). However, the poor fatigue performance of the capacitor required the adoption of hybrid electrode structures. A thin IrO 2 layer, as thin as 6 nm, which was inserted between top Pt electrode and PZT layer was sufficient for improving the fatigue performance without any degradation of the other ferroelectric properties. However, the same layer adopted on the bottom Pt electrode was not effective in improving the fatigue performance with degradation in P–V and J–V properties. This was ascribed to IrO 2 layer dissolution into the PZT layer during the crystallization annealing of the PZT thin film. A thicker IrO 2 layer resulted in more serious degradation.
Type of Medium:
Online Resource
ISSN:
0884-2914
,
2044-5326
DOI:
10.1557/JMR.2002.0257
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
2002
detail.hit.zdb_id:
54876-5
detail.hit.zdb_id:
2015297-8
