In:
Optical Materials Express, Optica Publishing Group, Vol. 10, No. 1 ( 2020-01-01), p. 129-
Abstract:
Ge-Se thin film waveguide is used in optical devices because of its excellent optical properties. We investigated the structural and optical properties of as-deposited and thermally annealed Ge 18 Se 82 films and the associated waveguides. The optimized annealing condition at 170 °C was determined for Ge 18 Se 82 films. This study reveals that the annealing process can reduce the density of homopolar bonds and voids in the films. After the annealing process, Ge 18 Se 82 waveguides with the dimensions of 1.0 µm×4.0 µm and 1.5 µm×4.0 µm present 0.22 dB/cm and 0.26 dB/cm propagation loss reduction, respectively. This finding suggests that thermal annealing is an appropriate method for improving the performance of chalcogenide glass devices.
Type of Medium:
Online Resource
ISSN:
2159-3930
DOI:
10.1364/OME.10.000129
Language:
English
Publisher:
Optica Publishing Group
Publication Date:
2020
detail.hit.zdb_id:
2619914-2
