In:
Proceedings of International Conference on Leading Edge Manufacturing in 21st century : LEM21, Japan Society of Mechanical Engineers, Vol. 2005.2, No. 0 ( 2005), p. 889-892
Type of Medium:
Online Resource
ISSN:
2424-3086
Uniform Title:
Development of Chemo-Mechanical Grinding (CMG) Process : Surface and Sub-surface Analysis of Si Wafer Produced by CMG(M^4 processes and micro-manufacturing for science)
DOI:
10.1299/jsmelem.2005.2.889
Language:
English
,
Japanese
Publisher:
Japan Society of Mechanical Engineers
Publication Date:
2005