In:
The Proceedings of Conference of Hokuriku-Shinetsu Branch, Japan Society of Mechanical Engineers, Vol. 2017.54, No. 0 ( 2017), p. E021-
Type of Medium:
Online Resource
ISSN:
2424-2772
Uniform Title:
光ナノインプリント加工向けのガス透過性金型の開発
DOI:
10.1299/jsmehs.2017.54.E021
Language:
English
,
Japanese
Publisher:
Japan Society of Mechanical Engineers
Publication Date:
2017