In:
Journal of Intelligent Material Systems and Structures, SAGE Publications, Vol. 22, No. 14 ( 2011-09), p. 1613-1622
Abstract:
Our research team has developed a 2D micro image display device that can potentially overcome the size reduction limits while maintaining the high-image resolution and field of view obtained by mirror-based display systems. The basic design of the optical scanner includes a microfabricated SU-8 cantilever waveguide that is electromechanically deflected by a piezoelectric actuator. From the distal tip of the cantilever waveguide, a light beam is emitted and the direction of propagation is displaced along two orthogonal directions. The waveforms for the actuator and the LED light modulation are generated and controlled using a field programmable gate array. Our recent study is an update to the previously-reported mechanical scanner, replacing the hand-built PZT scanner and fiber waveguide with a microfabricated system incorporating aerosol-deposited PZT thin film and a polymeric SU-8 wave guide. In this article, we report on the design and fabrication of a prototype miniaturized 2D scanner, discuss optical and mechanical the modeling of the system's properties and present the experimental results.
Type of Medium:
Online Resource
ISSN:
1045-389X
,
1530-8138
DOI:
10.1177/1045389X11409603
Language:
English
Publisher:
SAGE Publications
Publication Date:
2011
detail.hit.zdb_id:
2088313-4
