In:
Transactions of the Institute of Measurement and Control, SAGE Publications
Abstract:
The side sensitive group runs double sampling (SSGRDS) [Formula: see text] scheme is previously studied under the known process parameters (Case-K) assumption. As the process parameters are hardly known in practical situations, they must be estimated using a suitably chosen in-control (IC) Phase-I sample. However, various studies demonstrated that a substantial amount of Phase-I sample is necessary so that the scheme with unknown process parameters (Case-U) attains a performance almost similar to that of the Case-K counterpart. Since it is challenging to acquire a vast number of IC samples, we examine the optimal designs of the Case-U SSGRDS [Formula: see text] scheme such that the average number of observations to signal (ANOS) and expected ANOS (EANOS) are minimised. The optimal parameters obtained for the Case-U SSGRDS [Formula: see text] scheme enable it to have a performance comparable to that of the Case-K counterpart, without the need for a large number of Phase-I samples. We show that the Case-U SSGRDS [Formula: see text] scheme is effective in identifying the process mean shift of a silicon epitaxial process.
Type of Medium:
Online Resource
ISSN:
0142-3312
,
1477-0369
DOI:
10.1177/01423312241249824
Language:
English
Publisher:
SAGE Publications
Publication Date:
2024
detail.hit.zdb_id:
244053-2
detail.hit.zdb_id:
2025882-3
SSG:
3,2
