In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 39, No. 3R ( 2000-03-01), p. 1203-
Abstract:
The effects of electrodes on the deposition characteristics and electrical properties of lead zirconate titanate (PZT) films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition (ECR-PECVD) were investigated. Pt/Ti/SiO 2 /Si and RuO 2 /SiO 2 /Si were used as bottom electrodes (substrates) for PZT capacitors. Pt and
RuO 2 were used as top electrodes. The nucleation of the perovskite phase was more difficult on RuO 2 substrates than on Pt/Ti substrates, and the PZT films grown on RuO 2 substrates tend to have Pb-based second phases. Precise control of the flow rates of metalorganic sources (particularly the lead source) and the introduction of a proper seed layer are required to obtain films of the single perovskite phase and good electrical properties on the RuO 2 substrate. An excellent leakage current density of 10 -6 A/cm 2 at 150 kV/cm was obtained from the Pt(top)/PZT/RuO 2 (bottom) capacitor with the introduction of a 4 nm-thick Ti-oxide seed layer. The polarization fatigue and current leakage characteristics of the PZT capacitors with four different electrode configurations (Pt ∥Pt,
RuO 2 ∥Pt, Pt ∥RuO 2 , and
RuO 2 ∥RuO 2 ) were also investigated. Only the RuO 2 /PZT/RuO 2 capacitor did not show any polarization fatigue even after 10 10 cycles, while the other capacitors, whose either top or bottom electrode was Pt, showed distinct polarization fatigues. The RuO 2 /PZT/RuO 2 capacitor, however, showed a leakage current density of as high as 10 -4 A/cm 2 at 100 kV/cm.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.39.1203
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2000
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
