In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 3S ( 1997-03-01), p. 1907-
Abstract:
We experimentally investigate the feasibility of a realization method for the three-dimensional photonic crystal in the optical wavelength region. Micromachining techniques of dry-etching, wafer-bonding and laser beam diffraction pattern observation techniques are utilized. Each process is investigated using an AlGaAs/GaAs semiconductor system, and the feasibility of this method is successfully demonstrated for a structure having a photonic bandgap in the 10 µm wavelength region.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.1907
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1997
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7