In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 36, No. 3R ( 1997-03-01), p. 1268-
Abstract:
In SF 6 /Ar and CF 4 /Ar mixtures at a total pressure of 0.5 Torr, the discharge characteristics at 1-MHz have been investigated as a function of the mixing ratio. In the case of the SF 6 /Ar mixture, discharge parameters, such as discharge-sustaining voltage and discharge current, suddenly decrease by mixing only 5% SF 6 with Ar, and the plasma exists uniformly only inside the gap between electrodes. By increasing the SF 6 ratio, the electron temperature rises, and tends to saturate at large SF 6 ratios. In the case of the CF 4 /Ar mixture, the plasma density near the discharge axis is lower than that around the edge of the electrode at small CF 4 ratios. At a CF 4 ratio of 20%, in particular, the plasma density in the interelectrode gap becomes very low, and the spatiotemporal emission profile across the gap around the edge of the electrode is different from that at the axis. At CF 4 ratios greater than 60%, the discharge parameters suddenly change due to the electronegativity of CF 4 . These characteristics are synergistic.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.36.1268
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1997
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7
