In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 35, No. 4S ( 1996-04-01), p. 2416-
Abstract:
Laser-induced surface reaction for the Si(111)/Cl 2 system has been observed using second-harmonic generation (SHG). Chlorine gas molecules are introduced to the clean Si surface and their adsorption, desorption and reaction are indirectly measured by surface SHG. In the case of Nd:YAG laser measurement, SHG output decays rapidly with exposure to Cl 2 and is recovered by pump beam irradiation with a power of 65 mJ/pulse. Cl coverage can be estimated from SHG intensity and we determine the mean residence times of adsorbed Cl to be 300 ns and 11.4 s with and without pump beam exposure, respectively, at a sample temperature of 180° C. In the case of Ti-sapphire laser measurement, SHG outputs increase and decay rapidly with exposure to Cl 2 as measured by 800 nm and 1300 nm probe beams, respectively.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.35.2416
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1996
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7