In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 32, No. 1A ( 1993-01-01), p. L110-
Abstract:
A new surface treatment involving spin coating of ethanol on substrate prior to O 3 -tetraethylorthosilicate (TEOS) deposition by atmospheric pressure chemical vapor deposition (APCVD) was found to be very effective for improvement of gap-filling properties and film quality. Deposited film has a “flowlike” surface shape similar to that of spin-on-glass (SOG) film, and can be used to fill trenches of 0.3 µm width and 1.2 µm height (aspect ratio of 4) which could not be filled by a conventional O 3 -TEOS APCVD. Effects of the surface treatment by some other organic solvents are also reported and a possible mechanism is presented.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.32.L110
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1993
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
2006801-3