In:
Japanese Journal of Applied Physics, IOP Publishing, Vol. 30, No. 8B ( 1991-08-01), p. L1498-
Abstract:
ZrF 4 -based binary glass films are for the first time synthesized by plasma-enhanced chemical vapor deposition (PCVD) and their optical transmission spectrum is measured from the UV to near IR region. The films are pore-free and transparent. No absorption band caused by OH or other impurities can be observed in the near IR region. Weak absorption bands attributed to defect centers, which are induced by plasma bombardment, are observed in the UV to visible region.
Type of Medium:
Online Resource
ISSN:
0021-4922
,
1347-4065
DOI:
10.1143/JJAP.30.L1498
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
1991
detail.hit.zdb_id:
218223-3
detail.hit.zdb_id:
797294-5
detail.hit.zdb_id:
2006801-3
detail.hit.zdb_id:
797295-7