In:
Journal of Micro/Nanolithography, MEMS, and MOEMS, SPIE-Intl Soc Optical Eng, Vol. 13, No. 4 ( 2014-10-21), p. 043003-
Type of Medium:
Online Resource
ISSN:
1932-5150
DOI:
10.1117/1.JMM.13.4.043003
Language:
English
Publisher:
SPIE-Intl Soc Optical Eng
Publication Date:
2014
detail.hit.zdb_id:
3056313-6