In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, American Vacuum Society, Vol. 32, No. 2 ( 2014-03-01)
Abstract:
The defects in (134¯0)ZnO epitaxial film grown on (114)LaAlO3 (LAO) have been systematically investigated by using transmission electron microscopy. At the ZnO/LAO interface, the Burgers vectors of misfit dislocations are identified to be 1/3[1¯21¯0] and 1/2[0001] . Threading dislocations with the Burgers vectors of 1/3⟨112¯0⟩ and ⟨0001⟩ are distributed on the basal plane. In (134¯0)ZnO film, the predominant planar defects are basal stacking faults (BSFs) with 1/6⟨202¯3⟩ displacement vectors. The densities of dislocations and BSFs are about 3.8 × 1010 cm−2 and 3.1 × 105 cm−1, respectively.
Type of Medium:
Online Resource
ISSN:
0734-2101
,
1520-8559
Language:
English
Publisher:
American Vacuum Society
Publication Date:
2014
detail.hit.zdb_id:
1475424-1
detail.hit.zdb_id:
797704-9
