In:
Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers (IEEE), Vol. 21, No. 2 ( 2012-04), p. 467-475
Type of Medium:
Online Resource
ISSN:
1057-7157
,
1941-0158
DOI:
10.1109/JMEMS.2011.2179014
Language:
Unknown
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date:
2012
detail.hit.zdb_id:
2027726-X