Online Resource
Institute of Electrical and Electronics Engineers (IEEE)
;
2011
In:
Journal of Microelectromechanical Systems Vol. 20, No. 3 ( 2011-06), p. 561-563
In:
Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers (IEEE), Vol. 20, No. 3 ( 2011-06), p. 561-563
Type of Medium:
Online Resource
ISSN:
1057-7157
,
1941-0158
DOI:
10.1109/JMEMS.2011.2127460
Language:
Unknown
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
Publication Date:
2011
detail.hit.zdb_id:
2027726-X
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