In:
Plasma Sources Science and Technology, IOP Publishing, Vol. 29, No. 5 ( 2020-05-11), p. 05LT01-
Type of Medium:
Online Resource
ISSN:
1361-6595
DOI:
10.1088/1361-6595/ab8175
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2020
detail.hit.zdb_id:
2004012-X