In:
Journal of Micromechanics and Microengineering, IOP Publishing, Vol. 27, No. 1 ( 2017-01-01), p. 015032-
Type of Medium:
Online Resource
ISSN:
0960-1317
,
1361-6439
DOI:
10.1088/1361-6439/27/1/015032
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2017
detail.hit.zdb_id:
1480280-6
detail.hit.zdb_id:
1069644-1