In:
Plasma Sources Science and Technology, IOP Publishing, Vol. 23, No. 2 ( 2014-04-03), p. 025017-
Type of Medium:
Online Resource
ISSN:
0963-0252
,
1361-6595
DOI:
10.1088/0963-0252/23/2/025017
Language:
Unknown
Publisher:
IOP Publishing
Publication Date:
2014
detail.hit.zdb_id:
2004012-X