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    Scanning-tunneling-microscopy-based nanolithography of diamond-like carbon films
    AIP Publishing ; 2004
    In:  Applied Physics Letters Vol. 85, No. 23 ( 2004-12-06), p. 5727-5729
    Details
    In: Applied Physics Letters, AIP Publishing, Vol. 85, No. 23 ( 2004-12-06), p. 5727-5729
    Abstract: We demonstrate an approach for nanometer-scale lithography of diamond-like carbon films employing a local electron injection from a scanning tunneling microscope tip under ultrahigh-vacuum conditions. The electrons induce a graphitization of the tetrahedrally bound carbon. With this technique, complex patterns of conducting lines and dots smaller than 10nm can be written. Tunneling spectroscopy and conductive force microscopy were used to further characterize the carbon nanostructures.
    Type of Medium: Online Resource
    ISSN: 0003-6951 , 1077-3118
    URL: Article
    DOI: 10.1063/1.1831567
    RVK:
    UA 1000
    Language: English
    Publisher: AIP Publishing
    Publication Date: 2004
    detail.hit.zdb_id: 211245-0
    detail.hit.zdb_id: 1469436-0
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