In:
Materials Science in Semiconductor Processing, Elsevier BV, Vol. 16, No. 6 ( 2013-12), p. 1873-1878
Type of Medium:
Online Resource
ISSN:
1369-8001
DOI:
10.1016/j.mssp.2013.06.016
Language:
English
Publisher:
Elsevier BV
Publication Date:
2013
detail.hit.zdb_id:
2029689-7