In:
Materials Science in Semiconductor Processing, Elsevier BV, Vol. 3, No. 5-6 ( 2000-10), p. 427-431
Type of Medium:
Online Resource
ISSN:
1369-8001
DOI:
10.1016/S1369-8001(00)00068-8
Language:
English
Publisher:
Elsevier BV
Publication Date:
2000
detail.hit.zdb_id:
2029689-7