In:
Microsystem Technologies, Springer Science and Business Media LLC, Vol. 26, No. 1 ( 2020-01), p. 239-264
Type of Medium:
Online Resource
ISSN:
0946-7076
,
1432-1858
DOI:
10.1007/s00542-019-04634-6
Language:
English
Publisher:
Springer Science and Business Media LLC
Publication Date:
2020
detail.hit.zdb_id:
1476561-5
detail.hit.zdb_id:
1223008-X