In:
SID Symposium Digest of Technical Papers, Wiley, Vol. 48, No. 1 ( 2017-05), p. 437-440
Abstract:
The 2.7 inch flexible AMOELD is successfully demonstrated through FTIR analysis and mechanical simulation. Through FTIR analysis we can optimize the CVD parameter to realize the SiNx of WVTR~10 −5 (60°/90% R.H.). According to the simulation result, the curvature radius can be reduced to 10mm by modulating the Organic Coating for Planarization(OCP) layer thickness.
Type of Medium:
Online Resource
ISSN:
0097-966X
,
2168-0159
DOI:
10.1002/sdtp.2017.48.issue-1
Language:
English
Publisher:
Wiley
Publication Date:
2017
detail.hit.zdb_id:
2526337-7