Abstract
Submillimeter-wave antennas have been fabricated on 1-μm thick silicon-oxynitride membranes. This approach results in better patterns than previous lens-coupled antennas, and eliminates the dielectric loss associated with the substrate lens. Measurements on a wideband log-periodic antenna at 700 GHz, 370 GHz and 167 GHz show no sidelobes and 3-dB beamwidths between 40° and 60°. A linear imaging array has similar patterns at 700 GHz. Possible applications for membrane antennas include wideband superconducting tunnel-junction receivers for radio astronomy and imaging arrays for radiometry and plasma diagnostics.
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Rebeiz, G.M., Regehr, W.G., Rutledge, D.B. et al. Submillimeter-wave antennas on thin membranes. Int J Infrared Milli Waves 8, 1249–1255 (1987). https://doi.org/10.1007/BF01011076
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DOI: https://doi.org/10.1007/BF01011076