Polycrystalline (Mn, Zn)Fe₂O₄ films were prepared on silica glass substrate by CVD using three kinds of acetylacetonatocomplexes, Mn(acac)₂, Fe(acac)₃ and Zn(acac)₂.H₂O as starting materials. These complexes were evaporated at a reduced total pressure of 10 Torr and at temperatures of 205°C, 140-150°C and 85°C, respectively and transported with nitrogen carrier gas to the deposition zone. The growth conditions and magnetic properties of the polycrystalline (Mn, Zn)Fe₂O₄ films were as follows. deposition temperature: 500-600°C, oxygen gas flow rate: 10 ml/min, reaction time: 20 min, saturation magnetization: 50 emu/g, coercive force: 80 Oe and Curie temperature: 270°C.

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