Skip to main content
Log in

Time-domain modulated free-carrier absorption measurements of recombination process in silicon wafers

  • Published:
The European Physical Journal Special Topics Aims and scope Submit manuscript

Abstract.

A time-domain modulated free-carrier absorption (MFCA) is developed both experimentally and theoretically to investigate the photo-carrier dynamics of silicon wafers illuminated by a square-wave-modulated super-band-gap laser beam. An explicit three-dimensional (3-D) theoretical expression for the temporal behavior of the MFCA signal is obtained by solving a 3-D carrier-diffusion equation The time-domain MFCA model is used to fit the experimental MFCA signals of p- and n-type Si wafers via a multi-parameter fitting procedure to determine simultaneously the electronic transport properties, that is, the bulk lifetime, the ambipolor diffusivity, and the front surface recombination velocity. The uncertainties of the fitted parameter values are estimated.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  • S.W. Glunz, W. Warta, J. Appl. Phys. 77, 3243 (1995)

    Google Scholar 

  • T. Ikari, A. Fukuyama, T. Murata, M. Suemitsu, N. Haddad, V. Reita, J.P. Roger, D. Fournier Mater. Sci. Eng. B 124-125, 345 (2005)

  • D. Shaughnessy, A. Mandelis, J. Appl. Phys. 93, 5236 (2003)

    Google Scholar 

  • A. Mandelis, J. Batista, D. Shaughnessy, Phys. Rev. B 67, 205208 (2003)

    Google Scholar 

  • B. Li, D. Shaughnessy, A. Mandelis, J. Batista, J. Garcia, J. Appl. Phys. 96, 186 (2004)

    Google Scholar 

  • A. Mandelis, M. Pawlak, C. Wang, I. Delgadillo-Holtfort, J. Pelzl, J. Appl. Phys. 98, 123518 (2005)

    Google Scholar 

  • F. Sanii, F.P. Giles, R.J. Schwartz, J.L. Gray, Solid-State Electron. 35, 311 (1992)

  • D. Shaughnessy, A. Mandelis, J. Appl. Phys. 93, 5236 (2003)

    Google Scholar 

  • B. Li, D. Shaughnessy, A. Mandelis, J. Appl. Phys. 97, 023701 (2005)

    Google Scholar 

  • X. Zhang, B. Li, C. Gao, Appl. Phys. Lett. 89, 112120 (2006)

    Google Scholar 

  • A.A. Istratov, H. Hieslmair, E.R. Weber, Appl. Phys. A 70, 489 (2000)

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Gao, C., Li, B. & Zhang, X. Time-domain modulated free-carrier absorption measurements of recombination process in silicon wafers. Eur. Phys. J. Spec. Top. 153, 275–277 (2008). https://doi.org/10.1140/epjst/e2008-00444-2

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1140/epjst/e2008-00444-2

Keywords

Navigation