Abstract
The thesis takes comb capacitance type micro-accelerometer as the research target and designs a new type of biaxial micro-accelerometer with variable cross-section beam. The biaxial accelerometer is mainly composed of proof mass, comb capacitation and cantilever beam. The design of cantilever beam is based on variable cross section. The section size increases linearly with the increase of the beam length so that the influence of stress concentration can be reduced and the detection rigidity in the y-axis and z-axis directions is the same. Therefore, dual-axis detection can be realized. Firstly, taking the regular quadrilateral as an example, derive the moment of inertia of any regular polygonal section, and construct the expression of the maximum deflection of a variable cross-section beam; then determine the deflection factors of the cantilever beam under pure bending, and verify the accuracy of the expression through finite element analysis; The beam is used in the micro-accelerometer, and the design rationality of the variable-section beam micro-accelerometer is verified by simulation analysis: modal analysis determined the working frequency of micro-accelerometer with variable cross-section beam. Harmonic load analysis proved that the micro-accelerometer has a larger range. According to thermal analysis, it has better adaptability to high-temperature environments. Furthermore, harmonic response analysis proved that resonance can be effectively avoided, and fatigue analysis proves that it is much safer and has longer life. The results show that the deflection expression established in this paper can be widely used in regular polygonal variable-section beam deflection calculation and stability analysis; compared with the constant-section beam micro-accelerometer, the new biaxial variable-section beam micro-accelerometer has better system performance.
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Funding
This work obtains support from the National Major Scientific Instrument Special Project (2014YQ24044504), and the 2019 Project of Basic Public Service Platform for Industrial Technology (0714EMTC0200898).
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JS: conceptualization, methodology, investigation, writing—review and editing. JW: conceptualization, methodology, writing original draft preparation and simulation analysis. KG: investigation, writing—review and structural design. XH: investigation, formula derivation and simulation analysis. FG: resources, data analysis and curation. YH: investigation, resources. NL: investigation and resources. JW: investigation and resources.
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Sun, J., Wang, J., Gao, K. et al. Design and performance study on a new biaxial micro-accelerometer with variable cross-section beam. Microsyst Technol 27, 4111–4120 (2021). https://doi.org/10.1007/s00542-020-05187-9
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DOI: https://doi.org/10.1007/s00542-020-05187-9